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마이크로웨이브 플라즈마에서 메탄-수소가스로 부터 다이아몬드박막의 화학증착
- Title
- 마이크로웨이브 플라즈마에서 메탄-수소가스로 부터 다이아몬드박막의 화학증착
- Date Issued
- 1990-06
- Publisher
- 한국세라믹학회
- ISSN
- 1229-7801
- Article Type
- Article
- Citation
- 한국세라믹학회지, vol. 26, no. 3, page. 331 - 340, 1990-06
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Related Researcher
- 제정호JE, JUNG HO
- Dept of Materials Science & Enginrg