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플라즈마화학증착법에의한 TIN박막밀착력에 TI중간층이 미치는 영향

Title
플라즈마화학증착법에의한 TIN박막밀착력에 TI중간층이 미치는 영향
Authors
우치구김선효이상로
POSTECH Authors
김선효
Date Issued
Jan-1992
Publisher
대한금속재료학회 ( 구 대한금속학회 )
URI
http://oasis.postech.ac.kr/handle/2014.oak/33172
ISSN
0253-3847
Article Type
Article
Citation
대한금속학회지, vol. 330, no. 12, page. 1438 - 47, 1992-01
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김선효KIM, SEON HYO
Ferrous & Energy materials Technology
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