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SIMOX SOI 제조시 산소석출물의 거동과 전기적 특성에 미치는 영향
- Title
- SIMOX SOI 제조시 산소석출물의 거동과 전기적 특성에 미치는 영향
- POSTECH Authors
- 금범만
- Date Issued
- 1992-02
- Publisher
- 한국진공학회
- ISSN
- 1225-8822
- Article Type
- Article
- Citation
- 한국진공학회지, vol. 1, no. 1, page. 206 - 211, 1992-02
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Related Researcher
- 김범만KIM, BUM MAN
- Dept of Electrical Enginrg