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REMOTE PECVD 산화막의 증착특성 및 박막특성 연구
- Title
- REMOTE PECVD 산화막의 증착특성 및 박막특성 연구
- Date Issued
- 1992-08
- Publisher
- 대한전자공학회
- ISSN
- 1016-135X
- Article Type
- Article
- Citation
- 전자공학회논문지 A, vol. 29, no. 8, page. 674 - 681, 1992-08
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Communities & Collection
Related Researcher
- 강봉구KANG, BONG KOO
- Dept of Electrical Enginrg