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RUO2 박막의 산소분위기 열처리시 열적 안정성에 관한 연구

Title
RUO2 박막의 산소분위기 열처리시 열적 안정성에 관한 연구
Authors
오상호박찬경백홍구
Date Issued
1998-12
Publisher
한국재료학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/32629
ISSN
1225-0562
Article Type
Article
Citation
한국재료학회지, vol. 8, no. 12, page. 1090 - 1098, 1998-12
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박찬경PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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