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위상이동 간섭계를 이용한 SI3N4 박막의 두께 분포 측정 KCI
- Title
- 위상이동 간섭계를 이용한 SI3N4 박막의 두께 분포 측정
- Date Issued
- 2005-04
- Publisher
- 한국비파괴검사학회
- ISSN
- 1225-7842
- Article Type
- Article
- Citation
- 비파괴검사 학회지, vol. 25, no. 2, page. 67 - 73, 2005-04
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Communities & Collection
Related Researcher
- 홍정기HONG, CHUNG KI
- Dept of Physics