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Reactive RF 마그네트론 스퍼터링법에 의한 Si(100)기판 MgO thin films on Si(100) substrate by reactive RF magnetron sputtering

Title
Reactive RF 마그네트론 스퍼터링법에 의한 Si(100)기판 MgO thin films on Si(100) substrate by reactive RF magnetron sputtering
Authors
이영준
Date Issued
1994
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001897838
https://oasis.postech.ac.kr/handle/2014.oak/3068
Article Type
Thesis
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