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Plasma 화학증착에서 AIN 박막성장에 미치는 공정변수 deposition in PECVD process
- Title
- Plasma 화학증착에서 AIN 박막성장에 미치는 공정변수 deposition in PECVD process
- Authors
- 박현철
- Date Issued
- 1994
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001897832
https://oasis.postech.ac.kr/handle/2014.oak/3062
- Article Type
- Thesis
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