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POLY SI1-XGEX 박막의 산화 거동 연구
- Title
- POLY SI1-XGEX 박막의 산화 거동 연구
- Date Issued
- 2000-01
- Publisher
- 한국진공학회
- ISSN
- 1225-8822
- Article Type
- Article
- Citation
- 한국진공학회지, vol. 9, no. 4, page. 346 - 352, 2000-01
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Communities & Collection
Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg