Structural and optical properties of Zn1-xMgxO thin films synthesized with metal organic chemical vapor deposition
SCIE
SCOPUS
- Title
- Structural and optical properties of Zn1-xMgxO thin films synthesized with metal organic chemical vapor deposition
- Authors
- Park, SH; Kim, KB; Seo, SY; Kim, SH; Han, SW
- Date Issued
- 2006-08
- Publisher
- MINERALS METALS MATERIALS SOC
- Abstract
- We present the structural and optical properties of Zn1-xMgxO thin films studied using x-ray diffraction (XRD), extended x-ray absorption fine structure (EXAFS), and photoluminescence (PL) measurements. The Zn1-xMgxO films on sapphire [00011 substrates were fabricated with metal organic chemical vapor deposition (MOCVD). The XRD measurements showed that the Zn1-xMgxO films (x <= 0.05) had a wurtzite structure without any MgO phase and were epitaxially grown along the c-axis of the Al2O3 substrate. The lattice constant of the Zn0.95Mg0.05O film shrank by 0.023 angstrom, compared with that of ZnO crystals. From the EXAFS measurements on the Zn1-xMgxO films at Zn K-edge, we found a substantial amount of distortion in the bond length of Zn-Zn pairs with a small amount of Mg substitution on the Zn site. The PL measurements showed a gradual increment of the main exciton transitions from 3.36 eV (x = 0.0) to 3.57 eV (x = 0.05) at 10 K. We also observed a strong deep-level emission near 2.3 eV from the specimen with x = 0.05.
- Keywords
- metal organic chemical vapor deposition (MOCVD); extended x-ray absorption fine structure (EXAFS); photoluminescence (PL); bandgap; film; nanorod; ZnO; ZnMgO; ABSORPTION FINE-STRUCTURE; ZNO; MGXZN1-XO; EMISSION; LAYERS; EDGE
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/29598
- DOI
- 10.1007/s11664-006-0217-7
- ISSN
- 0361-5235
- Article Type
- Article
- Citation
- JOURNAL OF ELECTRONIC MATERIALS, vol. 35, no. 8, page. 1680 - 1684, 2006-08
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