REMOVING 20 NM PARTICLES USING A SUPERSONIC ARGON PARTICLE BEAM GENERATED WITH A CONTOURED LAVAL NOZZLE
SCIE
SCOPUS
- Title
- REMOVING 20 NM PARTICLES USING A SUPERSONIC ARGON PARTICLE BEAM GENERATED WITH A CONTOURED LAVAL NOZZLE
- Authors
- Lee, JW; Hwang, KS; Lee, KH; Yi, MY; Lee, MJ
- Date Issued
- 2009-01
- Publisher
- BRILL ACADEMIC PUBLISHERS
- Abstract
- A cryogenic particle beam is an effective means of removing nano-sized contaminant particles, but the particle beam generated with a simple-hole nozzle has not been successful in removing particles smaller than 30 nm. Based on molecular dynamics (MD) simulation results that smaller cryogenic particles moving at a higher velocity are more effective in removing contaminant particles in the 10 nm range, a contoured Laval nozzle of a particular expansion angle and length was used in this study, instead of the simple-hole nozzle, to generate particle beams of high intensity and controlled size moving at high velocities. A variety of particle size and velocity were obtained by controlling the stagnation pressure/temperature and the back pressure, and using Laval nozzles with differing throat sizes and expansion angles. The new particle beams could remove almost completely a variety of ceramic and Cu particles, down to 20 nm size range, on a flat surface or in trenches. (C) Koninklijke Brill NV, Leiden, 2009
- Keywords
- Nanoparticle cleaning; cryogenic particle beam; Laval nozzle; NANOPARTICLE REMOVAL; PLASMA
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/29040
- DOI
- 10.1163/156856108X39
- ISSN
- 0169-4243
- Article Type
- Article
- Citation
- JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, vol. 23, no. 5, page. 769 - 777, 2009-01
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