REMOVING 20 NM CERAMIC PARTICLES USING A SUPERSONIC PARTICLE BEAM FROM A CONTOURED LAVAL NOZZLE
SCIE
SCOPUS
- Title
- REMOVING 20 NM CERAMIC PARTICLES USING A SUPERSONIC PARTICLE BEAM FROM A CONTOURED LAVAL NOZZLE
- Authors
- Hwang, KS; Lee, MJ; Yi, MY; Lee, JW
- Date Issued
- 2009-05-29
- Publisher
- ELSEVIER SCIENCE SA
- Abstract
- Cryogenic particle beam is an effective means of removing nano-sized contaminant particles from a substrate. To overcome the current cleaning limit of 50 nm, a particle beam with novel properties - smaller bullet size moving at a higher velocity - was used. Argon or Ar/He mixture was expanded through contoured Laval nozzles of various expansion angles to generate extremely small particles through genuine nucleation and growth. Argon particles smaller than 100 nm - smaller by a factor of 10 or more than the conventional Argon aerosols - were successfully generated, and could perfectly remove various ceramic particles down to 20 nm. (C) 2009 Elsevier B.V. All rights reserved.
- Keywords
- Nano particle cleaning; Cryogenic; Supersonic nozzle
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/28797
- DOI
- 10.1016/J.TSF.2009.0
- ISSN
- 0040-6090
- Article Type
- Article
- Citation
- THIN SOLID FILMS, vol. 517, no. 14, page. 3866 - 3869, 2009-05-29
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- There are no files associated with this item.
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