Fabrication of polymer micro/nano-hybrid lens array by microstructured anodic aluminum oxide (AAO) mold
SCIE
SCOPUS
- Title
- Fabrication of polymer micro/nano-hybrid lens array by microstructured anodic aluminum oxide (AAO) mold
- Authors
- Lee, BK; Cha, KJ; Kwon, TH
- Date Issued
- 2009-04
- Publisher
- ELSEVIER SCIENCE BV
- Abstract
- in the present study, polymer micro/nano-hybrid lens array is fabricated by hot embossing process using a microstructured anodic aluminum oxide (AAO) mold. For a mass replication of functional microoptical elements such as antireflective microlens array, a novel fabrication method of a multiscale mold is proposed and demonstrated. The fabrication method consists of two consecutive steps - an indentation of an electropolished aluminum substrate for microstructures and an electrochemical oxidation process for nanostructures on top of the microstructures. By using the present fabrication method, the microstructured AAO mold is successfully realized and utilized in hot embossing process. In this manner, the PMMA microlens array covered with the close-packed nanolens array is fabricated. (C) 2008 Elsevier B.V. All rights reserved.
- Keywords
- Micro/nano-hybrid lens array; Microstructured anodic aluminum oxide (AAO) mold; Hot embossing; Multiscale structures; MODIFIED LIGA PROCESS; MICROLENS ARRAYS; REPLICATION
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/28178
- DOI
- 10.1016/J.MEE.2008.1
- ISSN
- 0167-9317
- Article Type
- Article
- Citation
- MICROELECTRONIC ENGINEERING, vol. 86, no. 4-6, page. 857 - 860, 2009-04
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.