Au catalyzed structural and electrical evolution of Ni/Au contact to GaN
- Title
- Au catalyzed structural and electrical evolution of Ni/Au contact to GaN
- Authors
- Kim, CC; Kim, JK; Lee, JL; Je, JH; Yi, MS; Noh, DY; Hwu, Y; Ruterana, P; 김종규
- Date Issued
- 2001-11
- Publisher
- WILEY-V C H VERLAG GMBH
- Abstract
- We investigated the micro-structural and electrical behavior of Ni/Au contacts on GaN(0001) during annealing in N-2 and in air. The formation of a Ni4N phase deteriorates the contact resistivity if annealed in N2. Annealing in air, however, dramatically improves it. The oxidation, by creating, them more energy favorable Ni-O bonds, seems to be the recipe to successfully suppress the formation of Ni4N which otherwise would be enhanced significantly by the presence of Au as a catalyst.
- Keywords
- P-TYPE GAN; FIELD-EFFECT TRANSISTORS; DIODES
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/28162
- ISSN
- 0031-8965
- Article Type
- Conference
- Files in This Item:
- There are no files associated with this item.
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