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초고주파 방전을 이용한 실리콘 산화막 및 질화막의 증착공정 개발
- Title
- 초고주파 방전을 이용한 실리콘 산화막 및 질화막의 증착공정 개발
- Authors
- 정윤권
- Date Issued
- 1992
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001897540
https://oasis.postech.ac.kr/handle/2014.oak/2770
- Article Type
- Thesis
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