Effective overhead hoist transport dispatching based on the Hungarian algorithm for a large semiconductor FAB

Abstract

This paper considers the vehicle dispatching problem in large-scale overhead hoist transport (OHT) systems of semiconductor fabrication lines. We propose a Hungarian algorithm based OHT reassignment approach named HABOR. HABOR attempts to take advantage of simultaneous vehicle reassignment based on up-to-date system status using the formulation of the assignment problem. The effectiveness of HABOR is demonstrated using a sample OHT system of a semiconductor fabrication line with more than 130 vehicles, where the flow path of the line allows direct delivery so that an inter-bay wafer movement can be accomplished by a single vehicle without an intermediate storage step at a stocker. HABOR compares favorably with the shortest travel distance first rule and with the reassignment-based rule recently proposed by the authors.