Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
SCIE
SCOPUS
- Title
- Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
- Authors
- Lee, CS; Kim, J; Son, JY; Choi, W; Kim, H
- Date Issued
- 2009-09-28
- Publisher
- ELSEVIER SCIENCE BV
- Abstract
- We prepared photocatalytic TiO2 thin films which exhibited relatively high growth rate and low impurity on polymer substrate by plasma enhanced atomic layer deposition (PE-ALD) from Ti(NMe2)(4) [tetrakis (dimethylamido) Ti,TDMAT] and O-2 Plasma to show the self-cleaning effect. The TiO2 thin films with anatase phase and bandgap energy about 3.3 eV were deposited at growth temperature of 250 degrees C and the photocatalytic effects were compared with commercial Activ glass. From contact angles measurement of water droplet and photo-induced degradation test of organic liquid, TiO2 thin films with anatase phases showed superhydrophilic phenomena and decomposed organic liquid after UV irradiation. The anatase TiO2 thin film on polymer substrate showed highest photocatalytic efficiency after 5 h UV irradiation. We attribute the highest photocatalytic efficiency of TiO2 thin film with anatase structure to the formation of suitable crystalline phase and large surface area. (C) 2009 Elsevier B.V. All rights reserved.
- Keywords
- TiO2; Photocatalyst; Plasma enhanced atomic layer deposition; Self-cleaning effect; Polymer substrate; TITANIUM-DIOXIDE; WATER; SURFACES; GLASS; PHOTOLYSIS; BACTERIA; ALD
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/26500
- DOI
- 10.1016/J.APCATB.2009.06.037
- ISSN
- 0926-3373
- Article Type
- Article
- Citation
- APPLIED CATALYSIS B-ENVIRONMENTAL, vol. 91, no. 3-4, page. 628 - 633, 2009-09-28
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.