Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition

Abstract

A novel fabrication method of Co and Ni metal nanorods (NRs) without catalyst or template, based on the spontaneous formation of NRs during plasma-enhanced atomic layer deposition (PE-ALD) is developed. Pure Co and Ni NRs 9-10 nm in diameter are synthesized on SiO2 and Si substrates by using metal-organic precursors and an NH3 plasma mixed with a suitable amount of SiH4 as a reactant. The lengths of the NRs are controlled on the nanometer scale by changing the number of PE-ALD growth cycles. Superconducting quantum interference device magnetometer measurements confirm. the magnetic anisotropy of Co NRs caused by shape anisotropy.