Electron Kinetic Property of a Magnetized Dual-Frequency Capacitively-Coupled Plasma

Abstract

Spatially-resolved electron-energy-distribution functions (EEDFs) of a magnetized dual-frequency (60 and 2 MHz) capacitive discharge are numerically investigated by using a one-dimensional particle-in-cell/Monte Carlo collision simulation. It is shown that the electron kinetic property over the entire energy range changes from a nonlocal to a local regime, as the magnetic field increases. This transition results from a reduction in the electron diffusion in coordinate space and an enhancement of the electron diffusion in energy space due to an increase in the magnetic field. In an asymmetric discharge, it is found that the electron kinetic property near the 2 MHz electrode, which has a smaller electrode with an external capacitor, is more localized than that near the 60 MHz electrode.