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A micro-machined piezoelectric hydrophone with hydrostatically balanced air backing
- Title
- A micro-machined piezoelectric hydrophone with hydrostatically balanced air backing
- POSTECH Authors
- Moon, W
- Date Issued
- Jan-2010
- Publisher
- Elsevier
- Keywords
- MEMS hydrophone; Piezoelectric sensor; Thin plate; Air backing; MODEL; SENSITIVITY; PRESSURE; PLATE
- ISSN
- 0924-4247
- Article Type
- Article
- Citation
- SENSORS AND ACTUATORS A-PHYSICAL, vol. 158, no. 1, page. 60 - 71, 2010-01
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Related Researcher
- 문원규MOON, WON KYU
- Dept of Mechanical Enginrg