Design and characterization of 2.45 GHz electron cyclotron resonance plasma source with magnetron magnetic field configuration for high flux of hyperthermal neutral beam
SCIE
SCOPUS
- Title
- Design and characterization of 2.45 GHz electron cyclotron resonance plasma source with magnetron magnetic field configuration for high flux of hyperthermal neutral beam
- Authors
- Kim, SB; Kim, DC; Namkung, W; Cho, M; Yoo, SJ
- Date Issued
- 2010-08
- Publisher
- AMER INST PHYSICS
- Abstract
- A 2.45 GHz electron cyclotron resonance (ECR) source with a magnetron magnetic field configuration was developed to meet the demand of a hyperthermal neutral beam (HNB) flux on a substrate of more than 1 x 10(15) cm(-2) s(-1) for industrial applications. The parameters of the operating pressure, ion density, electron temperature, and distance between the neutralization plate and the substrate for the HNB source are specified in a theoretical analysis. The electron temperature and the ion density are measured to characterize the ECR HNB source using a Langmuir probe and optical emission spectroscopy. The parameters of the ECR HNB source are in good agreement with the theoretically specified parameters. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3477998]
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/25834
- DOI
- 10.1063/1.3477998
- ISSN
- 0034-6748
- Article Type
- Article
- Citation
- REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 81, no. 8, 2010-08
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