Development of a dual-axis micromachined convective accelerometer with an effective heater geometry
SCIE
SCOPUS
- Title
- Development of a dual-axis micromachined convective accelerometer with an effective heater geometry
- Authors
- Usung Park; Byoungkyoo Park; Il-Kwon Moon; Kim, D; Kim, J
- Date Issued
- 2011-03
- Publisher
- ELSEVIER SCIENCE BV
- Abstract
- This paper describes the design, fabrication and testing of a dual-axis micromachined convective accelerometer with a diamond-shaped heater. Modification of heater geometry is advantageous because it is simple and ensures enhanced sensitivity without constraining device size or operating power. The diamond-shaped heater induces active heat flow and a sharp temperature gradient around the heater; together these effects provide high sensitivity. When the fabricated convective accelerometer used SF6 as an enclosed gas medium, its measured sensitivity was 3.5 mV/g when operating power was 7.4 mW and its bandwidth at -3 dB was 25 Hz. (C) 2010 Elsevier B.V. All rights reserved.
- Keywords
- Inertial sensor; Natural heat convection; Micro-electro-mechanical systems (MEMS); THERMAL ACCELEROMETER; OPTIMIZATION; SENSITIVITY
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/25074
- DOI
- 10.1016/J.MEE.2010.11.020
- ISSN
- 0167-9317
- Article Type
- Article
- Citation
- MICROELECTRONIC ENGINEERING, vol. 88, no. 3, page. 276 - 281, 2011-03
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