Synthesis and mechanical evaluation of quaternary Ti-Cr-Si-N coatings deposited by a hybrid method of arc ion plating and sputtering techniques
SCIE
SCOPUS
- Title
- Synthesis and mechanical evaluation of quaternary Ti-Cr-Si-N coatings deposited by a hybrid method of arc ion plating and sputtering techniques
- Authors
- Lee, DK; Kang, DS; Suh, JH; Park, CG; Kim, KH
- Date Issued
- 2005-11-21
- Publisher
- ELSEVIER SCIENCE SA
- Abstract
- New quaternary Ti-Cr-Si-N coatings were synthesized onto steel substrates (AISI 132) and Si wafers using a hybrid method of arc ion plating (AIP) and sputtering techniques. For the syntheses of Ti-Cr-Si-N coatings, the Ti-Cr-N coating process was performed substantially by a multi-cathodic AIP technique using Cr and Ti targets, and Si could be added by sputtering Si target during Ti-Cr-N deposition. In this work, comparative studies on microstructure and evaluation of mechanical properties between Ti-Cr-N and Ti-Cr-SiN coatings were conducted. As the Si was incorporated into Ti-Cr-N coatings, the Ti-Cr-Si-N coatings showed largely increased hardness value of approximately 42 GPa than one of 28 GPa for Ti-Cr-N coatings. The average friction coefficient of Ti-Cr-N coatings largely decreased from 0.7 to 0.35 with increasing Si content up to 20 at.%. (c) 2005 Elsevier B.V All rights reserved.
- Keywords
- Ti-Cr-Si-N; AIP; sputtering; microhardness; wear behavior; FILMS; NITRIDE; WEAR; OXIDATION; BEHAVIOR; SILICON; SYSTEM
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/24267
- DOI
- 10.1016/JSURFCOAT.20
- ISSN
- 0257-8972
- Article Type
- Article
- Citation
- SURFACE & COATINGS TECHNOLOGY, vol. 200, no. 5-6, page. 1489 - 1494, 2005-11-21
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- There are no files associated with this item.
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