Particle simulation of a magnetically enhanced dual-frequency capacitively coupled plasma
SCIE
SCOPUS
- Title
- Particle simulation of a magnetically enhanced dual-frequency capacitively coupled plasma
- Authors
- Dae Ho Kim; Ryu, CM
- Date Issued
- 2008-01-07
- Publisher
- IOP PUBLISHING LTD
- Abstract
- One-dimensional particle-in-cell/Monte Carlo simulations have been carried out to investigate the magnetic field effects on the asymmetric dual-frequency (27 and 2 MHz) capacitive discharge. Variations of the plasma characteristics such as plasma density, electrical property and ion-energy-distribution functions (IEDFs) for the various magnetic fields are examined. The increase in the magnetic field up to a few tens of gauss is found to increase the width of the IEDF and the plasma density. However, for a larger magnetic field less than 125 G, the width of the IEDF is found to be continuously decreasing with the reduction of the high-frequency-averaged sheath potential, while the plasma density increases.
- Keywords
- HEATING-MODE TRANSITION; ION ENERGY-DISTRIBUTION; RF DISCHARGES; SHEATH; VOLTAGE; SINGLE
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/22923
- DOI
- 10.1088/0022-3727/41/1/015207
- ISSN
- 0022-3727
- Article Type
- Article
- Citation
- JOURNAL OF PHYSICS D-APPLIED PHYSICS, vol. 41, no. 1, page. 15207-1 - 15207-8, 2008-01-07
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