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Ignition of peripheral plasma in capacitive discharges SCIE SCOPUS
- Title
- Ignition of peripheral plasma in capacitive discharges
- Date Issued
- 2008-08
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGI
- Abstract
- Ignition of peripheral plasma was examined in low-pressure (100-mtorr) RF capacitive coupled plasma by means of kinetic and fluid models. Plasma density and potential profiles are presented to visualize peripheral-plasma ignition. A dielectric gap size is an important parameter for a dense and stable plasma source.
- Keywords
- capacitive coupled plasma (CCP); modeling; peripheral plasma
- ISSN
- 0093-3813
- Article Type
- Article
- Citation
- IEEE TRANSACTIONS ON PLASMA SCIENCE, vol. 36, no. 4, page. 1392 - 1393, 2008-08
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