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Characterization of Deformation Behaviors and Elastic Moduli of Multilayered Films in Piezoelectric Inkjet Head

Title
Characterization of Deformation Behaviors and Elastic Moduli of Multilayered Films in Piezoelectric Inkjet Head
Authors
Hong, SGKirn, MLee, SBLee, CS
POSTECH Authors
Lee, CS
Date Issued
Jan-2008
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGI
Keywords
Bulge test; full-field optical measurement; multilayered films; piezoelectric inkjet head; THIN-FILMS; SILICON FILMS; BULGE TEST; MICROSTRUCTURE
URI
http://oasis.postech.ac.kr/handle/2014.oak/22430
DOI
10.1109/JMEMS.2008.2
ISSN
1057-7157
Article Type
Article
Citation
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 17, no. 5, page. 1155 - 1163, 2008-01
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