A particle-in-cell simulation of the breakdown and period doubling thresholds for a RF discharge Ar plasma
SCIE
SCOPUS
- Title
- A particle-in-cell simulation of the breakdown and period doubling thresholds for a RF discharge Ar plasma
- Authors
- Chung, TH; Yoon, HJ; Kim, TS; Lee, JK
- Date Issued
- 1996-04-14
- Publisher
- IOP PUBLISHING LTD
- Abstract
- RF glow-discharge plasmas provide mild energetic ion bombardment of exposed surfaces. The characteristics of a 10 MHz RF glow-discharge Ar plasma are studied by particle-in-cell simulation. The model simulates a spherical plasma device using a one-dimensional plasma model. The code is used to determine the breakdown voltage, V-rf, for a given pd, where rho is the gas pressure and d is the plasma discharge length. These values are then compared with Paschen's law for the DC case. Also, the breakdown voltage as a function of driver frequency is investigated. Due to the nonlinear capacitance of the plasma, the current and voltage waveforms are found to contain higher harmonic components and sub-harmonic components. Above a certain power level of the driver, sub-harmonics which are indicative of a period-doubling (PD) bifurcation are found to become dominant. The PD thresholds for varying pd, the magnitude of the current and the voltage of the Fourier-analysed components as a function of applied RF voltages are calculated. The PD threshold is always higher than the breakdown threshold. Finally, the pressure-dependence of the sheath width is discussed.
- Keywords
- SHEATH
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/21593
- DOI
- 10.1088/0022-3727/29/4/011
- ISSN
- 0022-3727
- Article Type
- Article
- Citation
- JOURNAL OF PHYSICS D-APPLIED PHYSICS, vol. 29, no. 4, page. 1014 - 1020, 1996-04-14
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