Effect of crucible geometry on the flow pattern in the magnetic field applied Czochralski process
SCIE
SCOPUS
- Title
- Effect of crucible geometry on the flow pattern in the magnetic field applied Czochralski process
- Authors
- Oh, HJ; Kang, IS
- Date Issued
- 1996-09
- Publisher
- ELSEVIER SCIENCE BV
- Abstract
- The effects of crucible geometry on the flow pattern and the oxygen concentration at the crystal-melt interface are studied numerically for the cusp type magnetic field applied Czochralski process. The numerically generated boundary-fitted orthogonal curvilinear coordinate systems are used with the finite difference method. The crucible geometry is found to have non-trivial effects on both the flow pattern and the oxygen concentration at the melt-crystal interface. Especially when the natural convection is dominant, the numerical results suggest that there exists a crucible shape which is advantageous over the conventional cylindrical shape in both the uniformity and the average level of oxygen concentration at the crystal-melt interface.
- Keywords
- CRYSTAL-GROWTH; OXYGEN-TRANSPORT; CONVECTION; SILICON; MELT; SIMULATION
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/21461
- DOI
- 10.1016/0022-0248(96)00230-8
- ISSN
- 0022-0248
- Article Type
- Article
- Citation
- JOURNAL OF CRYSTAL GROWTH, vol. 167, no. 1-2, page. 345 - 356, 1996-09
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- There are no files associated with this item.
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