Two-dimensional fluid simulation of capacitively coupled RF electronegative plasmas

Abstract

A two-dimensional self-consistent fluid simulation of capacitively coupled rf flow discharges of electronegative plasma with a cylindrically symmetric parallel plate electrode is presented. The model equations include continuity equations, a Poisson equation, and an electron energy balance equation. The two-dimensional distributions of charged particle densities, electric potential, electron temperature. and ionization rate are calculated. The effects of the applied rf voltage, the driver frequency, and the gas pressure on the discharge characteristics are investigated in detail.