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Background spectrum of synchrotron radiation-excited total reflection x-ray fluorescence for Si wafer analysis

Title
Background spectrum of synchrotron radiation-excited total reflection x-ray fluorescence for Si wafer analysis
Authors
Shin, NSChang, CTKoo, YMPadmore, H
POSTECH Authors
Koo, YM
Date Issued
Jan-2001
Publisher
JOHN WILEY & SONS LTD
Keywords
SURFACES
URI
http://oasis.postech.ac.kr/handle/2014.oak/20990
ISSN
0049-8246
Article Type
Article
Citation
X-RAY SPECTROMETRY, vol. 30, no. 2, page. 127 - 131, 2001-01
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구양모KOO, YANG MO
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