Optimized structures of multilayer soft X-ray reflectors in the spectral range of 30 to 300 angstrom
SCIE
SCOPUS
- Title
- Optimized structures of multilayer soft X-ray reflectors in the spectral range of 30 to 300 angstrom
- Authors
- Kim, DE; Cha, DH; Lee, SW
- Date Issued
- 1998-05
- Publisher
- JAPAN J APPLIED PHYSICS
- Abstract
- For wavelengths in the spectral range of 30 to 300 Angstrom, the structures of multilayer (ML) soft X-ray reflectors for maximum reflectivity at normal incidence were optimized. A dynamical theory of X-ray scattering was employed in the calculation for ideal ML structures. The calculation indicates that the optimization should be performed for a sufficiently large number of bilayers. The structural parameters optimized for a small number of bilayers do not yield the best performance. It is also observed that for a given number of bilayers, there exists a range of structural parameters for equivalent performance. In the spectral region considered, the maximum reflectivities vary from 40 to 78% with respect to wavelength.
- Keywords
- thin film; multilayer; reflectivity; soft X-ray reflectors; X-ray laser; X-ray scattering; MIRRORS; MO/SI; DIFFRACTION; MICROSCOPY; SCATTERING
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/20680
- DOI
- 10.1143/JJAP.37.2728
- ISSN
- 0021-4922
- Article Type
- Article
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, vol. 37, no. 5A, page. 2728 - 2733, 1998-05
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