Structural evolution of ZnO/sapphire(001) heteroepitaxy studied by real time synchrotron x-ray scattering
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SCOPUS
- Title
- Structural evolution of ZnO/sapphire(001) heteroepitaxy studied by real time synchrotron x-ray scattering
- Authors
- Park, SI; Cho, TS; Doh, SJ; Lee, JL; Je, JH
- Date Issued
- 2000-07-17
- Publisher
- AMER INST PHYSICS
- Abstract
- The structural evolution during heteroepitaxial growth of ZnO/sapphire(001) by radio-frequency magnetron sputtering has been studied using real-time synchrotron x-ray scattering. The two-dimensional (2D) ZnO(002) layers grown in the initial stage are highly strained and well aligned to the substrate having a mosaic distribution of 0.01 degrees full width at half maximum (FWHM), in sharp contrast to the reported transition 2D layers grown by molecular-beam epitaxy. With increasing film thickness, the lattice strain is relieved and the poorly aligned (1.25 degrees FWHM) three-dimensional (3D) islands are nucleated on the 2D layers. We attribute the 2D-3D transition to the release of the strain energy stored in the film due to the film/substrate lattice mismatch. (C) 2000 American Institute of Physics. [S0003-6951(00)01529-1].
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/19944
- DOI
- 10.1063/1.126972
- ISSN
- 0003-6951
- Article Type
- Article
- Citation
- APPLIED PHYSICS LETTERS, vol. 77, no. 3, page. 349 - 351, 2000-07-17
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