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Growth of a textured Pb(Zr0.4Ti0.6)O-3 thin film on LaNiO3/Si(001) using pulsed laser deposition SCIE SCOPUS

Title
Growth of a textured Pb(Zr0.4Ti0.6)O-3 thin film on LaNiO3/Si(001) using pulsed laser deposition
Authors
Kim, SSIl Kim, BPark, YBKang, TSJe, JH
Date Issued
2001-01-15
Publisher
ELSEVIER SCIENCE BV
Abstract
The structural characteristics of LaNiO3/Si(0 0 1) films grown by pulsed laser deposition have been studied mainly using a synchrotron X-ray scattering measurement. The films were grown with the (0 0 1) preferred orientation without any alignment in the in-plane direction. The initially unstrained film became strained gradually as it grew further, but its crystalline quality improved significantly. A fully (0 0 1) textured Pb(Zr0.4Ti0.6)O-3 film was successfully grown on such a (0 0 I) textured LaNiO3/Si(0 0 1) substrate as low as 350 degreesC. The nature of structure and microstructure of the Pb(Zr0.4Ti0.6)O-3 film appeared to be similar to that of the underlaying LaNiO3 film. (C) 2001 Elsevier Science B.V. All rights reserved.
Keywords
LaNiO3 thin film; PZT thin film; ferroelectric thin film; pulsed laser deposition; synchrotron X-ray scattering; LANIO3
URI
https://oasis.postech.ac.kr/handle/2014.oak/19666
DOI
10.1016/S0169-4332(00)00736-4
ISSN
0169-4332
Article Type
Article
Citation
APPLIED SURFACE SCIENCE, vol. 169, page. 553 - 556, 2001-01-15
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제정호JE, JUNG HO
Dept of Materials Science & Enginrg
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