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A hybrid-type micro-gripper with an integrated force sensor SCIE SCOPUS

Title
A hybrid-type micro-gripper with an integrated force sensor
Authors
Park, JMoon, W
Date Issued
2003-10
Publisher
SPRINGER-VERLAG
Abstract
A new hybrid-type micro-gripper that uses an integrated force sensor to control the gripping force was developed for handling micro-objects. The micro-gripper is composed of a piezoelectric multilayer bender for actuating the gripper fingers, silicon fingertips fabricated by use of silicon-based micromachining, and supplementary supports. The micro-gripper is referred to as a hybrid-type micro-gripper because it is composed of two main components: micro-fingertips fabricated using micromachining technology to integrate a very sensitive force sensor for measuring the gripping force, and piezoelectric gripper finger actuators that are capable of large gripping forces and moving strokes. A systematic design approach was applied to the design of each of components of the developed gripper, which made it possible to establish the functional requirements and design parameters of the micro-gripper. The micro-gripper was installed on a manual manipulator to assess its performance in tasks such as moving micro-objects from one position to a desired position. The gripping force signal was found to have a sensitivity of 667 muN/V and several micro-objects were successfully moved (grasped and released) with the developed gripper. It was found during the testing experiments that the frictional forces between the working plane and the micro-object could be utilized to facilitate the release of micro-objects from the micro-gripper.
Keywords
MICROGRIPPER
URI
https://oasis.postech.ac.kr/handle/2014.oak/18232
DOI
10.1007/s00542-002-0267-6
ISSN
0946-7076
Article Type
Article
Citation
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, vol. 9, no. 8, page. 511 - 519, 2003-10
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문원규MOON, WON KYU
Dept of Mechanical Enginrg
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