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Bent-beam electrothermal actuators - Part II: Linear and rotary microengines SCIE SCOPUS

Title
Bent-beam electrothermal actuators - Part II: Linear and rotary microengines
Authors
Park, JSChu, LLOliver, ADGianchani, YB
Date Issued
2001-06
Publisher
IEEE/ASME
Abstract
This paper reports on the use of bent-beam electrothermal actuators for the purpose of generating rotary and long-throw rectilinear displacements. The rotary displacements are achieved by orthogonally arranged pairs of cascaded actuators that are used to rotate a gear. Devices were fabricated using electroplated Ni, p(++) Si, and polysilicon as structural materials. Displacements of 20-30 mum with loading forces > 150 muN at actuation voltages < 12 V and power dissipation < 300 mW could be achieved in the orthogonally arranged actuator pairs, A design that occupies < 1 mm(2) area is presented. Long-throw rectilinear displacements were achieved by inchworm mechanisms in which pairs of opposing actuators grip and shift a central shank that is cantilevered on a flexible suspension. A passive lock holds the displaced shank between pushes and when the power is off, This arrangement permits large output forces to be developed at large displacements, and requires zero standby power. Several designs were fabricated using electroplated Ni as the structural material. Forces > 200 muN at displacements > 100 mum were measured.
Keywords
inchworm; micromachining; micromotor; positioner; scanner; thermal actuator; MICROMOTORS; FABRICATION; DESIGN
URI
https://oasis.postech.ac.kr/handle/2014.oak/17354
DOI
10.1109/84.925774
ISSN
1057-7157
Article Type
Article
Citation
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 10, no. 2, page. 255 - 262, 2001-06
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박재성PARK, JAE SUNG
Dept of Mechanical Enginrg
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