Electron kinetics in dc argon microplasmas
SCIE
SCOPUS
- Title
- Electron kinetics in dc argon microplasmas
- Authors
- Chang, H; Ryu, CM; Yoo, SJ; Kim, SB; You, SJ
- Date Issued
- 2012-05-16
- Publisher
- IOP PUBLISHING LTD
- Abstract
- We carried out one-dimensional particle-in-cell and Monte Carlo collisional simulations of argon dc microplasmas. It is found that argon dc microplasmas have quite different electron kinetics from those of conventional low-pressure argon dc plasmas or helium dc microplasmas. The electron energy probability functions (EEPFs) of the argon dc microplasma are bi-Maxwellian for pressures exceeding 100 Torr, whereas it shows a convex-shaped profile for 10 Torr. The different EEPFs at high pressures come from the fact that, as the pressure is increased, elastic and inelastic electron-neutral collisions increase, because the cathode fall length decreases more slowly than the electron-neutral collisional mean free paths.
- Keywords
- ATMOSPHERIC-PRESSURE; CATHODE-DISCHARGE; GLOW-DISCHARGE; ION KINETICS; PLASMA; SIMULATION; DEVICES
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/16236
- DOI
- 10.1088/0022-3727/45/19/195206
- ISSN
- 0022-3727
- Article Type
- Article
- Citation
- JOURNAL OF PHYSICS D-APPLIED PHYSICS, vol. 45, no. 19, page. 195206, 2012-05-16
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