Thickness Dependence of the Dielectric Properties of Epitaxial SrTiO3 Films on (001)Pt/SrTiO3
SCIE
SCOPUS
- Title
- Thickness Dependence of the Dielectric Properties of Epitaxial SrTiO3 Films on (001)Pt/SrTiO3
- Authors
- Boesch, DS; Son, J; LeBeau, JM; Cagnon, J; Stemmer, S
- Date Issued
- 2008-09
- Publisher
- The Japanese Society of Applied Physics
- Abstract
- Epitaxial, (001)-oriented SrTiO3 thin films were grown by sputtering on (001)Pt/SrTiO3 substrates to thicknesses ranging from 20 to 160 nm. Their dielectric properties were studied using parallel-plate capacitor structures. For film thicknesses greater than 40 nm, the thickness dependence of the capacitance density could be described with a model of low-permittivity interfacial layers that are connected in series with the bulk of the film. Thinner films showed a deviation from the linear relationship between the inverse capacitance density and thickness. They also showed an increase in loss and a small, power-law frequency dependence of the capacitance. These changes were indicative of different bulk dielectric properties of the thinnest SrTiO3 films. (C) 2008 The Japan Society of Applied Physics.
- Keywords
- (BA,SR)TIO3 THIN-FILMS; DEAD-LAYER; CAPACITORS; TEMPERATURE
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/15534
- DOI
- 10.1143/APEX.1.091602
- ISSN
- 1882-0778
- Article Type
- Article
- Citation
- Applied Physics Express, vol. 1, no. 9, 2008-09
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- There are no files associated with this item.
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