A Novel Resonant-Frequency-Trimming Method Using CNT Rope Synthesis
SCIE
SCOPUS
- Title
- A Novel Resonant-Frequency-Trimming Method Using CNT Rope Synthesis
- Authors
- Sung, J; Kim, JY; Moon, W; Lim, G
- Date Issued
- 2014-12
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Abstract
- We report a novel passive frequency-trimming method for microelectromechanical system (MEMS) resonators using carbon nanotube (CNT) rope synthesis on the side of the MEMS resonator. The method has a number of advantages over conventional methods, including low cost, reduced processing time, and greater applicability. First, the method requires only an ac voltage source and a dispersed CNT suspension to synthesize CNT ropes using dielectrophoresis. The method can be implemented in <3 min at room temperature and atmospheric pressure. The resonant frequency of the MEMS resonator can be shifted by 0.5%-24%. In addition, the method can restore the original frequency by cutting the CNT ropes by passing a current through them, so that trimming can be carried out repeatedly by connecting and disconnecting the CNT ropes until the desired frequency is achieved.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/13937
- DOI
- 10.1109/JMEMS.2014.2313624
- ISSN
- 1057-7157
- Article Type
- Article
- Citation
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 23, no. 6, page. 1383 - 1388, 2014-12
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.