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Guided domino lithography for uniform ultra-sharp nanoantenna arrays
- Title
- Guided domino lithography for uniform ultra-sharp nanoantenna arrays
- Authors
- Oh, Dong Kyo; Kim, Jaekyung; Lee, Jihae; RHO, JUNSUK
- Date Issued
- 2023-09-27
- Publisher
- Micro resist technology, AMO GmbH
- Article Type
- Conference
- Citation
- Micro and Nano Engineering (MNE), 2023-09-27
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Related Researcher
- 노준석RHO, JUNSUK
- Dept of Mechanical Enginrg