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Ferroelectric Diode with Large On/Off Ratio and Robust Endurance by Microwave Annealing in W/IGZO/HZO/Pt Stack
- Title
- Ferroelectric Diode with Large On/Off Ratio and Robust Endurance by Microwave Annealing in W/IGZO/HZO/Pt Stack
- Date Issued
- 2023-02-15
- Publisher
- SK하이닉스, 한국반도체산업협회, 한국반도체연구조합
- Article Type
- Conference
- Citation
- 제 30회 한국반도체학술대회, 2023-02-15
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