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Study of continuous-wave RGB laser annealing for the activation of phosphorus/boron-doped Si deep junction with high scan speed
- Title
- Study of continuous-wave RGB laser annealing for the activation of phosphorus/boron-doped Si deep junction with high scan speed
- Authors
- BAEK, ROCK HYUN; SEUNG, MO KIM; 권민규; 이해원; KIM, GISEONG; 강보현; 추형숙; 박진홍; 황현준; 이병훈
- Date Issued
- 2023-03-09
- Publisher
- IEEE Electron Devices Technology and Manufacturing (IEEE EDTM)
- Article Type
- Conference
- Citation
- The 7th Electron Devices Technology and Manufacturing Conference (IEEE EDTM 2023), 2023-03-09
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Related Researcher
- 황현준HWANG, HYEON JUN
- Dept of Electrical Enginrg