Amorphous Carbon Films for Electronic Applications
SCIE
SCOPUS
- Title
- Amorphous Carbon Films for Electronic Applications
- Authors
- Kim, Ik-Soo; Shim, Chae-Eun; Kim, Sang Won; Lee, Chang-Seok; Kwon, Junyoung; Byun, Kyung-Eun; Jeong, Unyong
- Date Issued
- 2022-01
- Publisher
- John Wiley and Sons Inc
- Abstract
- © 2022 Wiley-VCH GmbH.While various crystalline carbon allotropes, including graphene, have been actively investigated, amorphous carbon (a-C) thin films have received relatively little attention. The a-C is a disordered form of carbon bonding with a broad range of the CC bond length and bond angle. Although accurate structural analysis and theoretical approaches are still insufficient, reproducible structure–property relationships have been accumulated. As the a-C thin film is now adapted as a hardmask in the semiconductor industry and new properties are reported continuously, expectations are growing that it can be practically used as active materials beyond as a simple sacrificial layer. In this perspective review article, after a brief introduction to the synthesis and properties of the a-C thin films, their potential practical applications are proposed, including hardmasks, extreme ultraviolet (EUV) pellicles, diffusion barriers, deformable electrodes and interconnects, sensors, active layers, electrodes for energy, micro-supercapacitors, batteries, nanogenerators, electromagnetic interference (EMI) shielding, and nanomembranes. The article ends with a discussion on the technological challenges in a-C thin films.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/117923
- DOI
- 10.1002/adma.202204912
- ISSN
- 0935-9648
- Article Type
- Article
- Citation
- Advanced Materials, 2022-01
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- There are no files associated with this item.
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