Drastic reliability improvement using H2O2/UV treatment of HfO2 for heterogeneous integration
- Title
- Drastic reliability improvement using H2O2/UV treatment of HfO2 for heterogeneous integration
- Authors
- LEE, BYOUNG HUN
- Date Issued
- 2021-03-23
- Publisher
- IEEE
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/116509
- Article Type
- Conference
- Citation
- IRPS 2021, 2021-03-23
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.