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Effect of dead layer on ferroelectric HZO films for low thermal budget
- Title
- Effect of dead layer on ferroelectric HZO films for low thermal budget
- Authors
- 오승열; HWANG, HYUNSANG
- Date Issued
- 2022-12-08
- Publisher
- Stanford/Non-volatile Memory Technology Research Initiative
- Article Type
- Conference
- Citation
- The Non-Volatile Memory Technology Symposium, 2022-12-08
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