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Direct Conformal Growth of Hexagonal Boron Nitride on High-aspect-ratio Silicon-based Nanotrenches

Title
Direct Conformal Growth of Hexagonal Boron Nitride on High-aspect-ratio Silicon-based Nanotrenches
Authors
KIM, JONG KYU
Date Issued
2022-10-10
Publisher
The Alliance of Science Organisations in Germany
URI
https://oasis.postech.ac.kr/handle/2014.oak/115733
Article Type
Conference
Citation
International Workshop on Nitride Semiconductors (IWN), 2022-10-10
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김종규KIM, JONG KYU
Dept of Materials Science & Enginrg
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