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공간 차원 기반의 wafer bin map 불량 패턴 분류체계 개발
- Title
- 공간 차원 기반의 wafer bin map 불량 패턴 분류체계 개발
- Authors
- CHOI, SEUNG HYUN; KIM, EUN SU; LEE, DONG HEE; BAE, YOUNG MOK; HWANG, CHAN HO; OH, YOUNG CHAN; KIM, KWANG JAE
- Date Issued
- 2020-11-13
- Publisher
- 대한산업공학회
- Article Type
- Conference
- Citation
- 2020 대한산업공학회 추계학술대회, 2020-11-13
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Related Researcher
- 김광재KIM, KWANG JAE
- Dept. of Industrial & Management Eng.