DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ha, T | - |
dc.contributor.author | Park, CD | - |
dc.contributor.author | Chung, S | - |
dc.date.accessioned | 2015-06-25T02:34:56Z | - |
dc.date.available | 2015-06-25T02:34:56Z | - |
dc.date.created | 2013-03-07 | - |
dc.date.issued | 2012-02 | - |
dc.identifier.issn | 0734-2101 | - |
dc.identifier.other | 2015-OAK-0000026875 | en_US |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/11238 | - |
dc.description.abstract | A light sputter ion pump for ultra high vacuum was fabricated using 5-mm-thick neodymium iron boron (NdFeB) magnets. The weight of the pump was reduced by 30%, compared with conventional sputter ion pumps using ferrite magnets. For the sake of uniformity of magnetic field, three pieces of magnet were combined into a 100 mm x 150 mm magnet block for the 30 l/s pumping element. The authors coped with the low working temperature (below 150 degrees C) of the NdFeB magnets by forming a pure and dense chromium oxide film on the inner surface of the stainless steel pump body. With this vacuum thermal oxidation, the outgassing rate of water and hydrogen was considerably reduced so that a high temperature bakeout was unnecessary. The ultimate pressure achieved by the developed pump was much lower than 10-10 mbar even with a low bakeout temperature at 100 degrees C. (C) 2012 American Vacuum Society. [DOI: 10.1116/1.3677387] | - |
dc.description.statementofresponsibility | open | en_US |
dc.language | English | - |
dc.publisher | A V S AMER INST PHYSICS | - |
dc.relation.isPartOf | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | - |
dc.rights | BY_NC_ND | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
dc.title | Novel light sputter ion pump with neodymium iron boron magnets and the low outgassing body | - |
dc.type | Article | - |
dc.contributor.college | 물리학과 | en_US |
dc.identifier.doi | 10.1116/1.3677387 | - |
dc.author.google | Ha, T | en_US |
dc.author.google | Park, CD | en_US |
dc.author.google | Chung, S | en_US |
dc.relation.volume | 30 | en_US |
dc.relation.issue | 2 | en_US |
dc.contributor.id | 10071841 | en_US |
dc.relation.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | en_US |
dc.relation.index | SCI급, SCOPUS 등재논문 | en_US |
dc.relation.sci | SCI | en_US |
dc.collections.name | Journal Papers | en_US |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.30, no.2 | - |
dc.identifier.wosid | 000301505100001 | - |
dc.date.tcdate | 2019-01-01 | - |
dc.citation.number | 2 | - |
dc.citation.title | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | - |
dc.citation.volume | 30 | - |
dc.contributor.affiliatedAuthor | Chung, S | - |
dc.identifier.scopusid | 2-s2.0-84858027447 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 1 | - |
dc.description.scptc | 1 | * |
dc.date.scptcdate | 2018-10-274 | * |
dc.type.docType | Article | - |
dc.subject.keywordPlus | AUSTENITIC STAINLESS-STEEL | - |
dc.subject.keywordPlus | HIGH-VACUUM | - |
dc.subject.keywordPlus | THIN-FILM | - |
dc.subject.keywordPlus | SURFACE | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
library@postech.ac.kr Tel: 054-279-2548
Copyrights © by 2017 Pohang University of Science ad Technology All right reserved.