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Cited 67 time in webofscience Cited 73 time in scopus
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Fabrication of metal nanowire using carbon nanotube as a mask SCIE SCOPUS

Title
Fabrication of metal nanowire using carbon nanotube as a mask
Authors
Yun, WSKim, JPark, KHHa, JSKo, YJPark, KKim, SKDoh, YJLee, HJSalvetat, JPForro, L
Date Issued
2000-07
Publisher
AMER INST PHYSICS
Abstract
We report on the fabrication of metal nanowires on an insulating substrate using carbon nanotubes as a new kind of mask material. By irradiating Ar+ ions of 300 eV energy on a nanotube-coated Au/Ti thin layer on a SiO2 substrate, Au/Ti nanowires were successfully formed just underneath the nanotube, indicating that the carbon nanotubes had acted as a good mask against the argon ion bombardment, The Au/Ti wire of a few nanometers in width was frequently observed among the wires of various widths, After the formation of the Au/Ti nanowires, the carbon nanotube on the metal nanowire could be removed by atomic force microscope. (C) 2000 American Vacuum Society. [S0734-2101(00)07404-2].
URI
https://oasis.postech.ac.kr/handle/2014.oak/11217
DOI
10.1116/1.582349
ISSN
0734-2101
Article Type
Article
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 18, no. 4, page. 1329 - 1332, 2000-07
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