Fabrication of metal nanowire using carbon nanotube as a mask
SCIE
SCOPUS
- Title
- Fabrication of metal nanowire using carbon nanotube as a mask
- Authors
- Yun, WS; Kim, J; Park, KH; Ha, JS; Ko, YJ; Park, K; Kim, SK; Doh, YJ; Lee, HJ; Salvetat, JP; Forro, L
- Date Issued
- 2000-07
- Publisher
- AMER INST PHYSICS
- Abstract
- We report on the fabrication of metal nanowires on an insulating substrate using carbon nanotubes as a new kind of mask material. By irradiating Ar+ ions of 300 eV energy on a nanotube-coated Au/Ti thin layer on a SiO2 substrate, Au/Ti nanowires were successfully formed just underneath the nanotube, indicating that the carbon nanotubes had acted as a good mask against the argon ion bombardment, The Au/Ti wire of a few nanometers in width was frequently observed among the wires of various widths, After the formation of the Au/Ti nanowires, the carbon nanotube on the metal nanowire could be removed by atomic force microscope. (C) 2000 American Vacuum Society. [S0734-2101(00)07404-2].
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/11217
- DOI
- 10.1116/1.582349
- ISSN
- 0734-2101
- Article Type
- Article
- Citation
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 18, no. 4, page. 1329 - 1332, 2000-07
- Files in This Item:
-
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.