Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy
- Title
- Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy
- Authors
- Pettit, Chris; Jeong, Bongwon; Keum, Hohyun; Lee, Joohyung; Kim, Jungkyu; KIM, SEOK; McFarland, Donald Michael; Bergman, Lawreence A.; Vakakis, Alexander F.; Cho, Hanna
- Date Issued
- 2015-01
- Publisher
- Institute of Electrical and Electronics Engineers Inc.
- Abstract
- We report a new design concept of micromechanical cantilever system incorporating the 1/3 internal resonance during dynamic mode operation of atomic force microscopy (AFM). The passive amplification of third harmonic triggered through the mechanism of 1/3 internal resonance enables AFM to utilize multiple harmonics in an air environment. Detailed theoretical and experimental studies of the proposed design demonstrate that the multi-harmonic AFM (MH-AFM) is capable of simultaneous topography imaging and compositional mapping with more than 10-fold enhanced sensitivity.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/110398
- Article Type
- Conference
- Citation
- 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, page. 752 - 755, 2015-01
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