Recent progress on metasurfaces: applications and fabrication
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SCOPUS
- Title
- Recent progress on metasurfaces: applications and fabrication
- Authors
- Yoon, Gwanho; Tanaka, Takuo; Zentgraf, Thomas; Rho, Junsuk
- Date Issued
- 2021-09
- Publisher
- IOP PUBLISHING LTD
- Abstract
- Metasurfaces are two-dimensional arrays of subwavelength optical antennas and have possible applications of next-generation optical components such as ultrathin lenses, high-resolution holograms, and optical cloaks. The remaining challenges in the field of metasurfaces involve the development of methods to manufacture those tiny nanostructures on a large scale. There have been many attempts to overcome the limitations of electron beam lithography which is a conventional method to fabricate metasurfaces. This review provides and discusses recent progress on metasurfaces with priority given to their applications and scalable manufacturing methods such as nanoimprint lithography, deep-UV lithography, colloidal lithography, and direct laser writing. These nanofabrication techniques will contribute to the commercialization of metasurfaces.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/106789
- DOI
- 10.1088/1361-6463/ac0faa
- ISSN
- 0022-3727
- Article Type
- Article
- Citation
- JOURNAL OF PHYSICS D-APPLIED PHYSICS, vol. 54, no. 38, 2021-09
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